Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in note 11(C) to this chapter; parts and accessories:

Machines and apparatus for the manufacture of boules or wafers

Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits

Machines and apparatus for the manufacture of flat panel displays

Machines and apparatus specified in note 11(C) to this chapter

Parts and accessories

Nuclear reactors; fuel elements (cartridges), non-irradiated, for nuclear reactors; machinery and apparatus for isotopic separation; parts thereof:

Steam or other vapor generating boilers (other than central heating hot water boilers capable also of producing low pressure steam); super-heated water boilers; parts thereof:

Central heating boilers (other than those of heading 8402) and parts thereof:

Auxiliary plant for use with boilers of heading 8402 or 8403 (for example, economizers, super-heaters, soot removers, gas recoverers); condensers for steam or other vapor power units; parts thereof:

Producer gas or water gas generators, with or without their purifiers; acetylene gas generators and similar water process gas generators, with or without their purifiers; parts thereof:

Steam turbines and other vapor turbines, and parts thereof: